| 000 | 00561nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 2212144s2021 xx 000 0 und d | ||
| 020 | _a9783030616526 | ||
| 041 | _aeng | ||
| 100 | _aLena Zentner, Steffen Strehle. | ||
| 245 | _aMicroactuators, Microsensors and Micromechanisms : MAMM 2020 | ||
| 260 |
_aCham _bSpringer _c2021 |
||
| 650 | _aMechatronics. Nanotechnology. Machinery. Electronics. Mechatronics. Nanotechnology. Machinery and Machine Elements. Electronics and Microelectronics, Instrumentation. | ||
| 856 | _uhttps://doi.org/10.1007/978-3-030-61652-6 | ||
| 999 |
_c87646 _d87646 |
||