| 000 | 00567nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 2212144s2021 xx 000 0 und d | ||
| 020 | _a9783030617097 | ||
| 041 | _aeng | ||
| 100 | _aAlissa M. Fitzgerald, Carolyn D. White, Charles C. Chung. | ||
| 245 | _aMEMS Product Development : From Concept to Commercialization | ||
| 260 |
_aCham _bSpringer _c2021 |
||
| 650 | _aMicrotechnology. Microelectromechanical systems. Manufactures. Nanotechnology. Microsystems and MEMS. Machines, Tools, Processes. Nanotechnology. | ||
| 856 | _uhttps://doi.org/10.1007/978-3-030-61709-7 | ||
| 999 |
_c87680 _d87680 |
||