000 00616nam a2200133Ia 4500
008 2212144s2021 xx 000 0 und d
020 _a9783030626846
041 _aeng
100 _aSubhas Chandra Mukhopadhyay, Bo George, Joyanta Kumar Roy, Tarikul Islam.
245 _aInterdigital Sensors : Progress over the Last Two Decades
260 _aCham
_bSpringer
_c2021
650 _aElectronics. Microtechnology. Microelectromechanical systems. Materials. Detectors. Electronics and Microelectronics, Instrumentation. Microsystems and MEMS. Sensors and biosensors.
856 _uhttps://doi.org/10.1007/978-3-030-62684-6
999 _c88361
_d88361