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The Science and engineering of microelectronic fabrication /

Campbell, Stephen A.

The Science and engineering of microelectronic fabrication / Stephen A. Campbell - 2nd ed. - NY Oxford University 2001 - 603 p.

ISBN: 9780195681444

Subjects--Topical Terms:
ﾠ
Semiconductors --Design and constructionﾠ

Dewey Class. No.: 621.38152 CAM-S

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