The Science and engineering of microelectronic fabrication / (Record no. 12972)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00766pam a2200277a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 150502b2001 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780195681444 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | BITS Pilani Hyderabad |
| Original cataloging agency | BITS Pilani Hyderabad |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | ENG |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 CAM-S |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A. |
| 245 ## - TITLE STATEMENT | |
| Title | The Science and engineering of microelectronic fabrication / |
| Statement of responsibility, etc. | Stephen A. Campbell |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | NY |
| Name of publisher, distributor, etc. | Oxford University |
| Date of publication, distribution, etc. | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 603 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | ﾠ |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors --Design and constructionﾠ |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | 621.38152 CAM-S |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| Withdrawn status | |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| Withdrawn status | |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| Withdrawn status | |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| Withdrawn status | |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| Withdrawn status | |
| Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Date last checked out | Price effective from | Koha item type | Total Renewals | Checked out |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 621 | BITS Pilani Hyderabad | BITS Pilani Hyderabad | Text & Reference Section (Student cannot borrow these books) | 02/05/2015 | 1 | 621.38152 CAM-S | 5507 | 13/07/2024 | 01/08/2018 | 02/05/2015 | Course Reference Books | |||||
| 621 | BITS Pilani Hyderabad | BITS Pilani Hyderabad | Text & Reference Section (Student cannot borrow these books) | 02/05/2015 | 621.38152 CAM-S | 5508 | 13/07/2024 | 02/05/2015 | Course Reference Books | |||||||
| 621 | BITS Pilani Hyderabad | BITS Pilani Hyderabad | Text & Reference Section (Student cannot borrow these books) | 02/05/2015 | 4 | 621.38152 CAM-S | 5509 | 10/01/2020 | 10/01/2020 | 02/05/2015 | Course Reference Books | 4 | 12/08/2025 | |||
| 621 | BITS Pilani Hyderabad | BITS Pilani Hyderabad | Text & Reference Section (Student cannot borrow these books) | 02/05/2015 | 621.38152 CAM-S | 5510 | 13/07/2024 | 02/05/2015 | Course Reference Books | |||||||
| 621 | BITS Pilani Hyderabad | BITS Pilani Hyderabad | Text & Reference Section (Student cannot borrow these books) | 02/05/2015 | 621.38152 CAM-S | 5511 | 13/07/2024 | 02/05/2015 | Course Reference Books |