Semiconductor manufacturing handbook (Record no. 89558)

MARC details
000 -LEADER
fixed length control field 01261nam a2200121Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 221214s2005 xx 000 0 und d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780071445597
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title eng
245 ## - TITLE STATEMENT
Title Semiconductor manufacturing handbook
Statement of responsibility, etc. by Hwaiyu Geng.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New York, N.Y.
Name of publisher, distributor, etc. McGraw-Hill Education,
Date of publication, distribution, etc. 2005
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors Integrated circuits Semiconductors Integrated circuits Dielectrics. Silicides. Plasma engineering. Process control. Vacuum techology. Integrated circuits Microlithography. Ion implantation. Rapid thermal process. Plasma etching. Etching. Physical vapor deposition. Chemical vapor deposition. Epitaxy. Electrolytic polishing. Semiconductors Semiconductors Grinding and polishing. Microelectronic packaging. Electronic packaging. Nanotechnology. Microfabrication. Microelectromechanical systems. Flat panel displays. Gases. Waste gases Hydraulic conveying. Slurry pipelines. Chemical plants Water-supply engineering. Materials handling. Metrology. Six sigma (Quality control standard) Semiconductor industry Semiconductor industry Semiconductor industry Clean rooms Vibration. Noise control. Static eliminators. Electrostatics. Airborne infection. Air Sewage
856 ## - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://www.accessengineeringlibrary.com/content/book/9780071445597">https://www.accessengineeringlibrary.com/content/book/9780071445597</a>
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Date acquired Total Checkouts Barcode Date last seen Price effective from Koha item type
        BITS Pilani Hyderabad BITS Pilani Hyderabad 16/12/2022   MCW000175 16/12/2022 16/12/2022 McGraw Hill Ebook
        BITS Pilani Hyderabad BITS Pilani Hyderabad 16/12/2022   MCW000698 16/12/2022 16/12/2022 McGraw Hill Ebook
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