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Semiconductor manufacturing handbook by Hwaiyu Geng.

Material type: Text

Text

TextLanguage: English Publication details: New York, N.Y. McGraw-Hill Education, 2005ISBN:

9780071445597

Subject(s):

Semiconductors Integrated circuits Semiconductors Integrated circuits Dielectrics. Silicides. Plasma engineering. Process control. Vacuum techology. Integrated circuits Microlithography. Ion implantation. Rapid thermal process. Plasma etching. Etching. Physical vapor deposition. Chemical vapor deposition. Epitaxy. Electrolytic polishing. Semiconductors Semiconductors Grinding and polishing. Microelectronic packaging. Electronic packaging. Nanotechnology. Microfabrication. Microelectromechanical systems. Flat panel displays. Gases. Waste gases Hydraulic conveying. Slurry pipelines. Chemical plants Water-supply engineering. Materials handling. Metrology. Six sigma (Quality control standard) Semiconductor industry Semiconductor industry Semiconductor industry Clean rooms Vibration. Noise control. Static eliminators. Electrostatics. Airborne infection. Air Sewage

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Holdings ( 2 )
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Holdings
Item type	Current library	Call number	Status	Date due	Barcode	Item holds
McGraw Hill Ebook	BITS Pilani Hyderabad		Available		MCW000175
McGraw Hill Ebook	BITS Pilani Hyderabad		Available		MCW000698

Total holds: 0

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